What is MOCVD

In the MOCVD process, a heated wafer is exposed to a gas stream containing ‘precursors’ such as trimethylgallium and ammonia (TMGa, NH3). These precursors decompose when heated, typically at temperatures ranging from 400°C to 1300°C depending on the material to be deposited.

Metal Organic Chemical Vapor Deposition (MOCVD) is a modified version of chemical vapor deposition (CVD) [22,23]. It is utilized to produce high purity crystalline semiconducting thin films and micro/nano structures.

MOCVD, also referred to as MOVPE or OMVPE, is a widely used method for growing III-V group semiconductor materials on a silicon substrate.

In addition to its ability to achieve high-precision manufacturing, MOCVD offers the advantage of depositing thin films at high volumes. This large-scale production capability is more accurate compared to other methods. Furthermore, MOCVD is a flexible process, making it a more economical choice when compared to alternative processes.

Many companies provide subsidies ranging from 8-10 million yuan (approximately $1.2 to $1.5 million) for the purchase of MOCVD reactors. These reactors, which belong to the latest generation of high-capacity systems, typically cost around $2.5 million each.

Invented at the Rockwell International company by Harold Manasevit, MOCVD was ready for further exploration and advancement when Russell Dupuis became a part of the company in 1975.

A bubbler in MOCVD refers to a cylinder that is an integral part of the metal organic chemical vapor deposition (MOCVD) system. These devices are specifically designed to transport electronic grade metalorganic compounds from a liquid or solid precursor into a vapor form that can be utilized in the process.

Typical growth rates for metalorganic chemical vapor deposition (MOCVD) GaN films with high mobilities range from 2 to 3 μm per hour.

MBE is known for its high precision, but it comes with a hefty price tag and requires an ultra-high vacuum. On the other hand, MOCVD is a more cost-effective option that operates under pressure. However, it is important to note that MOCVD may not offer the same level of precision as MBE. Ultimately, the choice between the two techniques should be based on the specific requirements of the application and the desired level of control over the coated layers.